A model of the attachment/detachment cycle of electrostatic micro actuators

TitleA model of the attachment/detachment cycle of electrostatic micro actuators
Publication TypeJournal Article
Year of Publication1991
AuthorsAnderson, K. M., and J. E. Colgate
JournalProc. ASME Micromechanical Sensors, Actuators, and Systems, volume DSC
Volume32
Pages255